Photoinduced polycondensation processes in molybdenum and vanadium mixed oxide thin films: towards novel photolithographic material

Authors

  • Tatsiana V. Sviridova Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus
  • Aliaksandr S. Logvinovich Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus
  • Vladimir B. Odzaev Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus
  • Dmitry V. Sviridov Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus

Keywords:

photopolymerisation, molybdenum and vanadium mixed oxide, photoresists
Supporting Agencies
The research was supported by the Ministry of Education of the Republic of Belarus within the state programme of scientific research «Photonics and electronics for innovation» (assignment 3.11.4 «Development of physical and technological methods for targeted modification and control of masking layers based on inorganic polymers to create new radiation resistant photoresists», state registration No. 20212675).

Abstract

Investigation of the mechanism of UV-induced polycondensation in the oxoacid-derived mixed oxide V2O5 : MoO3 (molar ratio of oxides was 3 : 2) films employing fractal analysis of AFM images has evidenced that solid-state polymerisation process via 3D-mechanism resulting in the increased roughness of the microrelief of the film accompanied, however, with decrease of the fractal dimension. The polycondensation is accompanied with ordering yielding nuclei agglomerates built of nanometer-sized faceted pseudocrystals which become visible after development in the acid solution. These alignment effects, that result in the recovery of the photoresist film microrelief and the increase of the fractal dimension to the initial value ensures the dimension stability and sharp edges in the case of patterns generated with MoO3 : V2O5 photoresist films.

Author Biographies

  • Tatsiana V. Sviridova, Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus

    doctor of science (chemistry), full professor; professor at the department of inorganic chemistry, faculty of chemistry

  • Aliaksandr S. Logvinovich, Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus

    PhD (chemistry), docent; associate professor at the department of inorganic chemistry, faculty of chemistry

  • Vladimir B. Odzaev, Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus

    doctor of science (physics and mathematics), full professor; head of the department of semiconductor physics and nanoelectronics, faculty of physics

  • Dmitry V. Sviridov, Belarusian State University, 4 Niezaliezhnasci Avenue, Minsk 220030, Belarus

    doctor of science (chemistry), corresponding member of the National Academy of Sciences of Belarus, full professor; head of the department of inorganic chemistry, faculty of chemistry

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Published

2023-09-20

Issue

No. 2 (2023): Journal of the Belarusian State University. Chemistry

Section

Original Articles

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How to Cite

[1]
Sviridova, T.V. et al. 2023. Photoinduced polycondensation processes in molybdenum and vanadium mixed oxide thin films: towards novel photolithographic material. Journal of the Belarusian State University. Chemistry. 2 (Sep. 2023), 29–34.