Microstructure and phase composition of ZrN/SiNx multilayered coatings formed by reactive magnetron deposition

Authors

  • Vladimir V. Uglov Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus
  • Sergey V. Zlotski Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus
  • Igor A. Solodukhin Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus
  • Alexander A. Malashevich Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

Keywords:

multilayered coatings, microstructure, phase composition, reactive magnetron deposition

Abstract

In the present work, the microstructure and phase composition of multilayered nanoscaled ZrN/SiNx coatings with different thicknesses of individual ZrN and SiNx layers were investigated. The results of transmission electron microscopy (HRTEM) showed that multilayer ZrN/SiNx coatings formed by reactive magnetron deposition are alternating layers of ZrN and SiNx. The X­ray reflectometry (XRR) method made it possible to determine the density, thickness, and surface roughness of individual ZrN and SiNx layers. X­ray diffraction analysis showed that ZrN and SiNx layers have a crystalline and amorphous structure, respectively. The phase composition of mononitride ZrN coatings is characterized by the presence ZrN phase with preferential orientation (111). Phase composition results indicate a change in the preferential orientation from (111) observed for the mononitride ZrN films, to (200) forming in the multilayered ZrN/SiNx coatings.

Author Biographies

  • Vladimir V. Uglov, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

    doctor of science (physics and mathematics), full professor; head of the department of solid­state physics, faculty of physics

  • Sergey V. Zlotski, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

    PhD (physics and mathematics); senior researcher at the research laboratory of physics of ion­plasma modification of solids, department of solid­state physics, faculty of physics

  • Igor A. Solodukhin, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

    PhD (physics and mathematics), docent; deputy dean at the faculty of physics

  • Alexander A. Malashevich, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

    postgraduate student at the department of solid­state physics, faculty of physics

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Published

2019-05-20

Issue

No. 2 (2019): Journal of the Belarusian State University. Physics

Section

Condensed State Physics

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How to Cite

(1)
Uglov, V. V.; Zlotski, S. V.; Solodukhin, I. A.; Malashevich, A. A. Microstructure and Phase Composition of ZrN SiNx Multilayered Coatings Formed by Reactive Magnetron Deposition. Журнал Белорусского государственного университета. Физика 2019, No. 2, 105-111. https://doi.org/10.33581/2520-2243-2019-2-105-111.
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