Uglov, V. V.; Zlotski, S. V.; Solodukhin, I. A.; Malashevich, A. A. Microstructure and Phase Composition of ZrN SiNx Multilayered Coatings Formed by Reactive Magnetron Deposition. Журнал Белорусского государственного университета. Физика 2019, No. 2, 105-111. https://doi.org/10.33581/2520-2243-2019-2-105-111.