Brinkevich, D. I.; Prasalovich, U. S.; Yankouski, Y. N. Modification of Diazoquinone-Novolac Photoresist Films by Boron Ion Implantation. Журнал Белорусского государственного университета. Физика 2020, No. 2, 62-69. https://doi.org/10.33581/2520-2243-2020-2-62-69.