Uglov VV, Zlotski SV, Solodukhin IA, Malashevich AA. Microstructure and phase composition of ZrN/SiNx multilayered coatings formed by reactive magnetron deposition. Журнал Белорусского государственного университета. Физика. 2019;(2):105-111. doi:10.33581/2520-2243-2019-2-105-111