ANISHCHIK, Victor M.; HARUSHKA, Valiantsina A.; PILIPENKA, Uladzimir A.; PONARIADOV, Vladimir V.; SALADUKHA, Vitali A. Redistribution of impurity in ion-doped layers during fast heat treatment of gate dielectric. Journal of the Belarusian State University. Physics, [S. l.], n. 2, p. 48–53, 2019. DOI: 10.33581/2520-2243-2019-2-48-53. Disponível em: https://journals.bsu.by/index.php/physics/article/view/1351. Acesso em: 17 jul. 2026.