Goncharov, Victor K., Michail V. Puzyrev, Valery Yu. Stupakevich, and Nikita I. Shulhan. 2021. “The Spatial Density Distribution of the Ion Flux in the Laser-Plasma Source for Deposition of Nanocoating on Substrates of Increased Size”. Journal of the Belarusian State University. Physics, no. 2 (May): 81-87. https://doi.org/10.33581/2520-2243-2021-2-81-87.