V. V. Uglov, S. V. Zlotski, I. A. Solodukhin, and A. A. Malashevich, “Microstructure and phase composition of ZrN/SiNx multilayered coatings formed by reactive magnetron deposition”, Журнал Белорусского государственного университета. Физика, no. 2, pp. 105–111, May 2019, doi: 10.33581/2520-2243-2019-2-105-111.