[1]
V. B. Odzaev, “Influence of nitrogen ion implantation on the electrophysical properties of the gate dielectric of power MOSFETs”, Журнал Белорусского государственного университета. Физика, no. 3, pp. 55–64, Oct. 2020, doi: 10.33581/2520-2243-2020-3-55-64.