S. V. . Konstantinov, F. F. . Komarov, I. V. . Chizhov, V. A. . Zaikov, and D. V. . Zhyhulin, “The effect of deposition regimes of nanostructured nitride and carbonitride coatings on their structure, optical and electrophysical properties”, Журнал Белорусского государственного университета. Физика, no. 2, pp. 69–83, May 2024, Accessed: Jul. 17, 2026. [Online]. Available: https://journals.bsu.by/index.php/physics/article/view/6097