Brinkevich, Dmitrii I., et al. “Modification of Diazoquinone-Novolac Photoresist Films by Boron Ion Implantation”. Journal of the Belarusian State University. Physics, no. 2, June 2020, pp. 62-69, https://doi.org/10.33581/2520-2243-2020-2-62-69.