Brinkevich DI, Prasalovich US, Yankouski YN. Modification of diazoquinone-novolac photoresist films by boron ion implantation. Журнал Белорусского государственного университета. Физика [Internet]. 2020 Jun. 4 [cited 2026 Jul. 19];(2):62-9. Available from: https://journals.bsu.by/index.php/physics/article/view/1867