Structure and properties of zirconium oxide films doped with yttrium oxide obtained by laser deposition in vacuum

  • Nikolai A. Bosak B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus
  • Aleksandr N. Chumakov B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus
  • Aleksandr A. Shevchenok Belarusian State Agrarian Technical University, 99 Niezaliežnasci Avenue, Minsk 220023, Belarus
  • Liudmila V. Baran Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus
  • Victoria V. Malutina-Bronskaya SSPA «Optics, Optoelectronics and Laser Technology», 68 Niezaliežnasci Avenue, Minsk 220072, Belarus
  • Anatoly G. Karoza B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus
  • Aliaxei A. Ivanov B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus https://orcid.org/0000-0003-1711-1586
DOI: https://doi.org/10.33581/2520-2243-2020-2-10-18

Abstract

The thin films deposited in vacuum (2 ⋅ 10–2 mm Hg) on the silicon and glass substrates under the multi-pulse high-frequency (10 –15 kHz) laser exposure (laser radiation power density 100 MW/cm2 and the distance from the target to the substrate 40 mm) for zirconium oxide ZrO2 ceramics doped with yttrium oxide 5 % Y2O3. The morphology of the obtained films was studied using atomic force microscopy. The features of transmission spectra in the visible, near infrared and middle infrared region were revealed. The transmission of the zirconium oxide film on the silicon substrate reached 12 % in the spectral region from 1.0 to 2.5 μm, and in the region from 2.6 to 6.0 μm was 4.7 %. On a glass substrate, the transmittance at a wavelength of 643 nm was 60 %, and at a wavelength of 2500 nm it reached 87 %. In the middle infrared region, transmission at a frequency of 2548 cm–1 was 70 % and reached 75 % at a frequency of 3566 cm–1. The volt-ampere and capacitance-voltage characteristics of the obtained zirconium oxide films were characterized by non-linearity, including hysteresis, and are probably due to the presence of discrete surface states with a wide energy spectrum associated with nanoparticles and nanocrystalline film inclusions.

Author Biographies

Nikolai A. Bosak, B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus

PhD (physics and mathematics); leading researcher at the center «Plasma physics»

Aleksandr N. Chumakov, B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus

doctor of science (physics and mathematics); head of the laboratory of radiation plasma dynamics

Aleksandr A. Shevchenok, Belarusian State Agrarian Technical University, 99 Niezaliežnasci Avenue, Minsk 220023, Belarus

PhD (engineering), docent; associate professor at the department of physics, faculty of agro-power

Liudmila V. Baran, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

PhD (physics and mathematics); head of the research services sector, department of solid-state physics, faculty of physics

Victoria V. Malutina-Bronskaya, SSPA «Optics, Optoelectronics and Laser Technology», 68 Niezaliežnasci Avenue, Minsk 220072, Belarus

researcher

Anatoly G. Karoza, B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus

leading engineer at the center for analytical and spectral measurements

Aliaxei A. Ivanov, B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, 68 Niezaliežnasci Avenue, Minsk 220072, Belarus

junior researcher at the center «Plasma physics».

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Published
2020-06-02
Keywords: high-frequency laser effect, passive shutter, structure of thin films, ZrO2 5%Y2O3, transmission spectra, visible region, near infrared region, middle infrared region, volt-ampere characteristic, capacitance-voltage characteristic
How to Cite
Bosak, N. A., Chumakov, A. N., Shevchenok, A. A., Baran, L. V., Malutina-Bronskaya, V. V., Karoza, A. G., & Ivanov, A. A. (2020). Structure and properties of zirconium oxide films doped with yttrium oxide obtained by laser deposition in vacuum. Journal of the Belarusian State University. Physics, 2, 10-18. https://doi.org/10.33581/2520-2243-2020-2-10-18
Issue
No 2 (2020): Journal of the Belarusian State University. Physics
Section
Nanomaterials and Nanotechnologies

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