The spatial density distribution of the ion flux in the laser-plasma source for deposition of nanocoating on substrates of increased size

  • Victor K. Goncharov A. N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, 7 Kurčatava Street, Minsk 220045, Belarus
  • Michail V. Puzyrev A. N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, 7 Kurčatava Street, Minsk 220045, Belarus https://orcid.org/0000-0002-2985-2173
  • Valery Yu. Stupakevich Yanka Kupala State University of Grodno, 22 Ažeška Street, Hrodna 230023, Belarus
  • Nikita I. Shulhan Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus
DOI: https://doi.org/10.33581/2520-2243-2021-2-81-87

Abstract

The present work is devoted to the experimental determination of the uniformity of the ion flux density on a substrate with an increased size (~200 cm2 ) in order to form nanostructures by the laser-plasma method. The system for deposition of nanostructures consists of an erosion laser torch of the target material and a substrate located in a vacuum chamber. For smooth adjustment of the parameters of the deposited particles on the substrate, a grid is located between the laser target and the substrate, on which a negative potential is applied relative to the laser target. As a result, a particle stream is formed after the grid, consisting mainly of ions, whose energy can be reliably and smoothly controlled by applying a positive potential to the grid in relation to the substrate. Experiments have shown that the uniformity of the density of ion fluxes on a substrate of increased size (~200 cm2 ) in a laser-plasma source for nanocoating can be increased by applying an accelerating potential to the substrate in relation to the grid. The minimum difference between the ion flux density in the center of the target and at its edge can be reduced to ~5 %. As a result, it is technologically possible to clean the surface of the substrate with ions of the laser target material (secondary emission), create a pseudodiffusion layer of the target material in the near-surface region of the substrate, and apply the laser target material to the substrate. At the same time, all these operations can be performed sequentially without depressurising the vacuum chamber. This allows obtaining coating with good adhesion on substrates of increased size.

Author Biographies

Victor K. Goncharov, A. N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, 7 Kurčatava Street, Minsk 220045, Belarus

doctor of science (physics and mathematics), full professor; chief researcher at the laboratory of laser plasma dynamics

Michail V. Puzyrev, A. N. Sevchenko Institute of Applied Physical Problems, Belarusian State University, 7 Kurčatava Street, Minsk 220045, Belarus

PhD (physics and mathematics), docent; head of the laboratory of laser plasma dynamics

Valery Yu. Stupakevich, Yanka Kupala State University of Grodno, 22 Ažeška Street, Hrodna 230023, Belarus

senior lecturer at the department of information systems and technologies, physico-technical faculty

Nikita I. Shulhan, Belarusian State University, 4 Niezaliežnasci Avenue, Minsk 220030, Belarus

student at the faculty of radiophysics and computer technologies

References

  1. Chrisey DB, Hubler GK, editors. Pulsed laser deposition of thin films. New York: John Wiley & Sons; 1994. 648 p.
  2. Bonelli M, Miotello A, Mosaner P. Pulsed lased deposition of diamondlike carbon films on polycarbonate. Journal of Applied Physics. 2003;93(2):859. DOI: 10.1063/1.1530725.
  3. Vuoristo P, Tuominen J, Nurminen J. Laser coating and thermal spraying – process basics and coating properties. In: Proceedings of the International thermal spray conference and exhibition ITSC 2005; 2005 May 2–4; Basel, Switzerland. Düsseldorf: DVS-Verlag; 2005. p. 1270–1277.
  4. Goncharov VK, Kozlova EI, Puzyrev MV, Stupakevich VYu. [А source of aluminum ions with regulated ion energy]. In: Popechits VI, Dudchik YuI, Senkevich GA, editors. Prikladnye problemy optiki, informatiki, radiofiziki i fiziki kondensirovannogo sostoyaniya. Materialy Chetvertoi Mezhdunarodnoi nauchno-prakticheskoi konferentsii; 11–12 maya 2017 g.; Minsk, Belarus’ [Applied problems of optics, informatics, radiophysics and condensed matter physics. Proceedings of the 4th International scientific and practical conference; 2017 May 11–12; Minsk, Belarus]. Minsk: [s. n.]; 2017. p. 209–211. Russian.
  5. Goncharov VK, Puzyrev MV, Stupakevich VY. Physical processes in a laser source of aluminum ions with the controlled energy for nanofilm deposition. Journal of the Belarusian State University. Physics. 2017;3:79–87. Russian.
  6. Goncharov VK, Puzyrev MV, Stupakevich VYu. Controlling charged-particle fluxes in the erosive laser plasma of a graphite target in vacuum. Journal of Engineering Physics and Thermophysics. 2018;91(4):1056–1062. DOI: 10.1007/s10891-018-1831-y.
Published
2021-05-21
Keywords: laser plasma, ion beams, nanostructures, high adhesion
How to Cite
Goncharov, V. K., Puzyrev, M. V., Stupakevich, V. Y., & Shulhan, N. I. (2021). The spatial density distribution of the ion flux in the laser-plasma source for deposition of nanocoating on substrates of increased size. Journal of the Belarusian State University. Physics, 2, 81-87. https://doi.org/10.33581/2520-2243-2021-2-81-87
Issue
No 2 (2021): Journal of the Belarusian State University. Physics
Section
Laser Physics

Copyright (c) 2021 Journal of the Belarusian State University. Physics

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.

The authors who are published in this journal agree to the following:

  1. The authors retain copyright on the work and provide the journal with the right of first publication of the work on condition of license Creative Commons Attribution-NonCommercial. 4.0 International (CC BY-NC 4.0).
  2. The authors retain the right to enter into certain contractual agreements relating to the non-exclusive distribution of the published version of the work (e.g. post it on the institutional repository, publication in the book), with the reference to its original publication in this journal.
  3. The authors have the right to post their work on the Internet (e.g. on the institutional store or personal website) prior to and during the review process, conducted by the journal, as this may lead to a productive discussion and a large number of references to this work. (See The Effect of Open Access.)