Electrophysical properties of thin films of indium oxide

  • Vlas S. Volobuev Belarusian State Technological University, 13a Sviardlova Street, Minsk 220006, Belarus
  • Valeriy K. Dolgiy Belarusian State Agrarian Technical University, 99 Niezaliežnasci Avenue, Minsk 220012, Belarus
  • Artyom E. Pochtenny Independent researcher, Minsk, Belarus

Abstract

The electrophysical properties of thin films of indium oxide have been researched. The structure and chemical composition of the films were studied by electron diffraction, scanning electron microscopy and X-ray photoelectron spectroscopy. The temperature dependence of the conductivity of these films was measured at a constant oxygen concentration by cyclic thermal desorption. It is shown that the interaction of adsorbed particles with the film leads to the formation of various adsorption states that affect the electrophysical properties of the film. Based on the results of the study, a mechanism of conduction is proposed. The increase in conductivity associated with a decrease in the concentration of adsorbed oxygen is due to the fact that adsorbed oxygen is the centers of scattering of charge carriers, and a decrease in its concentration leads to an increase in the mobility of charge carriers. The results can be used in microelectronic sensors and sensors, since they have a higher response speed and significantly less reading drift compared to resistive sensors.

Author Biographies

Vlas S. Volobuev, Belarusian State Technological University, 13a Sviardlova Street, Minsk 220006, Belarus

PhD (physics and mathematics), docent; senior lecturer at the department of physical-chemical methods and quality assurance, faculty of organic substances technology

Valeriy K. Dolgiy, Belarusian State Agrarian Technical University, 99 Niezaliežnasci Avenue, Minsk 220012, Belarus

PhD (physics and mathematics), docent; associate professor at the department of natural sciences disciplines, faculty of farm machinery service

Artyom E. Pochtenny, Independent researcher, Minsk, Belarus

PhD (physics and mathematics), docent; independent researcher

References

  1. Rahim A, Santos LSS, Barros SBA, Kubota LT, Gushikem Y. Dissolved O2 sensor based on cobalt(II) phthalocyanine immobilized in situ on electrically conducting carbon ceramic mesoporous SiO2 /C material. Sensors and Actuators B: Chemical. 2013;177:231–238. DOI: 10.1016/j.snb.2012.10.110.
  2. Apetrei IM, Rodriguez-Mendez ML, Apetrei C, de Saja JA. Enzyme sensor based on carbon nanotubes / cobalt(II) phthalocyanine and tyrosinase used in pharmaceutical analysis. Sensors and Actuators B: Chemical. 2013;177:138–144. DOI: 10.1016/j.snb.2012.10.131.
  3. Takeda A, Oku T, Suzuki A, Akiyama T, Yamasaki Y. Fabrication and characterization of fullerene-based solar cells containing phthalocyanine and naphthalocyanine dimers. Synthetic Metals. 2013;177:48–51. DOI: 10.1016/j.synthmet.2013.06.011.
  4. Pochtenny AE, Misevich AV. [Influence of adsorbed oxygen on the conductivity of lead phthalocyanine films]. Pis’ma v Zhurnal tekhnicheskoi fiziki. 2003;29(1):56–61. Russian.
  5. Misevich AV, Pochtenny AE, Lappo AN. [Adsorption-resistive properties of composite films based on perylene pigments]. Trudy Belorusskogo gosudarstvennogo tekhnologicheskogo universiteta. Seriya 6, Fiziko-matematicheskie nauki i informatika. 2007;15:75–78. Russian.
  6. Pochtenny AE. Pryzhkovaya provodimost’ na postoyannom toke v sobstvennykh i primesnykh organicheskikh poluprovodnikakh [Hopping conductivity at direct current in intrinsic and impurity organic semiconductors]. Minsk: Belarusian State Technological University; 2016. 171 p. Russian.
  7. Pochtenny AE, Sagaidak DI, Fedoruk GG, Misevich AV. [Hopping conductivity in copper phthalocyanine and composite structures based on it]. Solid State Physics. 1996;38(8):2592–2601. Russian.
  8. Misevich AV, Pochtenny AE. The effect of gas adsorption on hopping conduction of metallophthalocyanines. Electron Technology. 2000;33(1–2):167–170.
Published
2023-05-30
Keywords: sensors, conduction mechanism, thin film, hopping conductivity, thermal desorption
Supporting Agencies The work was supported by the Ministry of Education of the Republic of Belarus (grant No. 20211250).
How to Cite
Volobuev, V. S., Dolgiy, V. K., & Pochtenny, A. E. (2023). Electrophysical properties of thin films of indium oxide. Journal of the Belarusian State University. Physics, 2, 66-73. Retrieved from https://journals.bsu.by/index.php/physics/article/view/5419
Issue
No 2 (2023): Journal of the Belarusian State University. Physics
Section
Condensed State Physics

Copyright (c) 2023 Journal of the Belarusian State University. Physics

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.

The authors who are published in this journal agree to the following:

  1. The authors retain copyright on the work and provide the journal with the right of first publication of the work on condition of license Creative Commons Attribution-NonCommercial. 4.0 International (CC BY-NC 4.0).
  2. The authors retain the right to enter into certain contractual agreements relating to the non-exclusive distribution of the published version of the work (e.g. post it on the institutional repository, publication in the book), with the reference to its original publication in this journal.
  3. The authors have the right to post their work on the Internet (e.g. on the institutional store or personal website) prior to and during the review process, conducted by the journal, as this may lead to a productive discussion and a large number of references to this work. (See The Effect of Open Access.)